Recirculating chillers LT
LNEYA LT recirculating chillers: −80 to 30 °C, ±0.5 °C; LT 10–30 °C cooling 3–14 kW at 15 °C; pump 30 L/min at 1.6 bar; MODBUS RTU RS485.
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Reference: MD series, 8-inch and 12-inch
MD Thermal Chuck / Vacuum Chuck (-75 to 225 °C)
Vacuum wafer chuck with built-in refrigeration for 8-inch and 12-inch wafers, -75 to 225 °C with ±0.5 °C accuracy and flatness of ±15 µm.
Key specifications
- Temperature range
- -75 to 225 (standard table -70 to 200) °C
- Temperature accuracy
- ±0.5 °C
- Temperature uniformity
- ±0.5 to ±1 °C
- Plate flatness
- ±15 µm
- Configured to your application by our specialists
- Installed and commissioned on site
- Training and after-sales support across Jordan, the GCC and MENA
MD Thermal Chuck / Vacuum Chuck (-75 to 225 °C)
Request a quoteOverview
Product overview
The LNEYA thermal chuck holds a wafer by vacuum and controls its temperature for performance testing, modeling, process development and failure analysis of semiconductor devices. It integrates its own refrigerator, so it avoids liquid nitrogen or carbon dioxide, and each system includes a chuck plus a hot-cold control unit.
Options include 8- and 12-inch vacuum chucks and square cold plates, multiple built-in temperature sensors and multi-zone control. Published data lists -70 to 200 °C (customizable), ±0.5 °C accuracy, plate flatness ±15 µm, and heating from -55 to +25 °C in 12 minutes; cooling methods are direct, liquid or air.
Specifications
Technical specifications
9 parameters
Performance
- Temperature range
- -75 to 225 (standard table -70 to 200) °C
- Temperature accuracy
- ±0.5 °C
- Temperature uniformity
- ±0.5 to ±1 °C
Physical
- Plate flatness
- ±15 µm
- Chuck size
- φ330*58 mm
- Wafer adsorption
- Vacuum
- Cooling methods
- Direct cooling / liquid cooling / air cooling
Control
- Heating time -55 to +25 °C
- 12 min
- Cooling time +25 to -55 °C
- 65 min
Features
Key features
- 01
Wafer sizes
8-inch and 12-inch vacuum chucks.
- 02
Multi-zone control
Several built-in temperature sensors.
- 03
No liquid nitrogen
Integrated refrigerator.
From order to operation
We stay with the instrument after it arrives
Al-Shaker specifies the configuration, documents the system, and supports it across Jordan, the GCC, and MENA.
- 01
Consult
- 02
Plan
- 03
Supply
- 04
Install
- 05
Train
- 06
Support
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Talk to the technical team
Tell us the application. We will specify the system.
Share the workflow, capacity, and compliance constraints. We respond with a recommended configuration, not a generic catalogue list.