
Recirculating chillers LT
LNEYA LT recirculating chillers: −80 to 30 °C, ±0.5 °C; LT 10–30 °C cooling 3–14 kW at 15 °C; pump 30 L/min at 1.6 bar; MODBUS RTU RS485.
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Compressor-free Peltier thermoelectric chiller for wafer etching, with ±0.1 °C control and 1200 to 4500 W of cooling at 20 °C.
Key specifications
TEC Peltier Chiller (-20 to 90 °C)
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The TEC series uses the Peltier effect instead of a refrigerant compressor, giving quick response, low noise and no refrigerant. It controls between -20 and 90 °C with ±0.1 °C accuracy and is aimed at plasma etching and electrostatic chuck (ESC) temperature control.
TEC-1200W, TEC-2500W and TEC-4500W provide 1200, 2450 and 4500 W of cooling at 20 °C (80, 350 and 700 W at -20 °C), with DC magnetic pumps, Galden HT135 fluid and DI cooling water below 20 °C.
Specifications
8 parameters
Fewer moving parts and lower noise.
Cooling begins within seconds of a command.
Suited to plasma etching and ESC control.
Al-Shaker specifies the configuration, documents the system, and supports it across Jordan, the GCC, and MENA.
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Share the workflow, capacity, and compliance constraints. We respond with a recommended configuration, not a generic catalogue list.